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Use of Voigt oscillators to characterize microelectronics materials by Infrared Spectroscopic Ellipsometry

✍ Scribed by Mickael Gilliot; Jean-Philippe Piel

Book ID: 108290069
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 504 KB
Volume: 516
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2008.04.008

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