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Nanoscale periodic and faceted structures formation on Si(1 0 0) by oblique angle oxygen ion sputtering

✍ Scribed by P. Karmakar; D. Ghose

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 229 KB
Volume: 230
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.12.097

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Nanoscale periodic and faceted structures formation on Si(1&#xa0;0&#xa0;0) by oblique angle oxygen ion sputtering

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