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Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering

✍ Scribed by S.K. Tan; R. Liu; C.H. Sow; A.T.S. Wee

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 488 KB
Volume: 248
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.03.170

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✦ Synopsis

We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O þ 2 beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38°and 44°incidence with ion current density of 100 lA cm À2 . At 56°and 62°incidence, the nanodot chains formed are shorter and more coarse, and the periodicity of the nanodot chains is suppressed. XPS analysis show that the surface of nanodots formed comprise In 2 O 3 and various InP oxides; and is In 2 O 3 -rich due to the preferential sputtering of P atoms.

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Self-organized nanodot formation on InP(1&#xa0;0&#xa0;0) by oxygen ion sputtering

✦ Synopsis

Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering