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Nanopositioning and Nonlinearity Compensation for Step Imprint Lithography Tool

✍ Scribed by Lu, Bing-heng ;Liu, Hong-zhong ;Ding, Yu-cheng ;Wang, Li ;Qiu, Zhi-hui

Book ID: 107378104
Publisher: Higher Education Press and Springer
Year: 2006
Tongue: English
Weight: 209 KB
Volume: 1
Category: Article
ISSN: 1673-3479
DOI: 10.1007/s11465-005-0003-x

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