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Nano-imprint lithography: Templates, imprinting and wafer pattern transfer

✍ Scribed by W.J. Dauksher; N.V. Le; E.S. Ainley; K.J. Nordquist; K.A. Gehoski; S.R. Young; J.H. Baker; D. Convey; P.S. Mangat

Book ID: 104050505
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 317 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.01.075

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