✦ LIBER ✦
Study of PMMA recoveries on micrometric patterns replicated by nano-imprint lithography
✍ Scribed by Christel Martin; Laurence Ressier; Jean Pierre Peyrade
- Book ID
- 104428447
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 146 KB
- Volume
- 17
- Category
- Article
- ISSN
- 1386-9477
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✦ Synopsis
We present a study of poly methyl methacrylate (PMMA) mechanical recoveries observed in the center of micro-scale structures replicated by nanoimprint lithography. Atomic force microscopy statistical analysis clearly reveals that the height and width of recoveries increase with the imprint force until a critical force above which they diminish to zero. This phenomenon, due to problems of PMMA resist transport, can be explained as a relaxation, directly after the demolding stage, of the elastic stresses stored by the resist during the imprint stage.