✦ LIBER ✦
Full wafer scale near zero residual nano-imprinting lithography using UV curable monomer solution
✍ Scribed by Heon Lee; Gun-Young Jung
- Book ID
- 104050242
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 475 KB
- Volume
- 77
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.