Characterization of and imprint results using indium tin oxide-based step and flash imprint lithography templates

✍ Scribed by Dauksher, W. J.; Nordquist, K. J.; Mancini, D. P.; Resnick, D. J.; Baker, J. H.; Hooper, A. E.; Talin, A. A.; Bailey, T. C.; Lemonds, A. M.; Sreenivasan, S. V.; Ekerdt, J. G.; Willson, C. G.

• Book ID: 121532336
• Publisher: AVS (American Vacuum Society)
• Year: 2002
• Tongue: English
• Weight: 549 KB
• Volume: 20
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.1520575