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Molecular dynamics study of pattern transfer in nanoimprint lithography

✍ Scribed by Ji-Hoon Kang; Kwang-Seop Kim; Kyung-Woong Kim

Publisher: Springer US
Year: 2007
Tongue: English
Weight: 919 KB
Volume: 25
Category: Article
ISSN: 1023-8883
DOI: 10.1007/s11249-006-9053-4

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## Abstract Using high‐aspect‐ratio nanostructures fabricated via two‐photon laser‐scanning lithography, we examine the deformation of elastomeric stamps used in soft nanolithography and the fidelity of patterns and replicas made using these stamps. Two‐photon laser‐scanning lithography enables us