Molecular dynamics study on compressive strength of monocrystalline, nanocrystalline and amorphous Si mold for nanoimprint lithography

✍ Scribed by Kazuhiro Tada; Shuhei Horimoto; Yoshihisa Kimoto; Masaaki Yasuda; Hiroaki Kawata; Yoshihiko Hirai

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 694 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.10.026