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Modeling phosphorus diffusion gettering of iron in single crystal silicon

✍ Scribed by Haarahiltunen, A.; Savin, H.; Yli-Koski, M.; Talvitie, H.; Sinkkonen, J.

Book ID
120030730
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
469 KB
Volume
105
Category
Article
ISSN
0021-8979

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