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Study of Gettering Mechanisms in Silicon: Competitive Gettering between Phosphorus Diffusion Gettering and Other Gettering Sites

✍ Scribed by Shabani, Mohammad B.; Yamashita, T.; Morita, E.

Book ID: 120395585
Publisher: Trans Tech Publications, Ltd.
Year: 2007
Tongue: English
Weight: 387 KB
Volume: 131-133
Category: Article
ISSN: 1662-9779
DOI: 10.4028/www.scientific.net/SSP.131-133.399

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