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Physical mechanisms of boron diffusion gettering of iron in silicon

✍ Scribed by V. Vähänissi; A. Haarahiltunen; H. Talvitie; M. Yli-Koski; J. Lindroos; H. Savin

Book ID
112183004
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
181 KB
Volume
4
Category
Article
ISSN
1862-6254

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