Experimental investigations of boron diffusion mechanisms in crystalline and amorphous silicon
β Scribed by D. De Salvador; E. Napolitani; S. Mirabella; E. Bruno; G. Impellizzeri; G. Bisognin; E.F. Pecora; F. Priolo; A. Carnera
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 605 KB
- Volume
- 154-155
- Category
- Article
- ISSN
- 0921-5107
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