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Mechanisms of ion-beam-enhanced diffusion in amorphous silicon

✍ Scribed by S. Coffa; D. C. Jacobson; J. M. Poate; F. Priolo

Publisher
Springer
Year
1992
Tongue
English
Weight
420 KB
Volume
54
Category
Article
ISSN
1432-0630

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✍ J.M. Poate πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 576 KB

## Three areas will be reviewed where the use of megaelectronvolt ion beams has contributed to the understanding of the properties of amorphous silicon: (1) thermodynamic and relaxation effects; (2) thermal and radiation-enhanced diffusion; (3) interracial segregation. trating on the segregation a