Phosphorus Diffusion Gettering of Platinum in Silicon: Formation of Near-Surface Precipitates

✍ Scribed by M. Seibt; A. Döller; V. Kveder; A. Sattler; A. Zozime

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 282 KB
• Volume: 222
• Category: Article
• ISSN: 0370-1972
• DOI: 10.1002/1521-3951(200011)222:1<327::aid-pssb327>3.0.co;2-u

✦ Synopsis

M. Seibt (a), A. Do È ller (a), V. Kveder (a), A. Sattler (a), and A. Zozime (b)