Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

✍ Scribed by M.I. Asghar; M. Yli-Koski; H. Savin; A. Haarahiltunen; H. Talvitie; J. Sinkkonen

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 334 KB
• Volume: 159-160
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2008.12.028