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Competition between internal and heavy doping gettering options in epi-silicon

✍ Scribed by C. Frigeri; E. Gombia; A. Motta

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 171 KB
Volume: 9
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.01.012

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