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Phosphorus vacancy cluster model for phosphorus diffusion gettering of metals in Si

✍ Scribed by Chen, Renyu; Trzynadlowski, Bart; Dunham, Scott T.

Book ID: 126993922
Publisher: American Institute of Physics
Year: 2014
Tongue: English
Weight: 759 KB
Volume: 115
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.4864377

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