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Modeling of an inductively-coupled Cl2/Ar plasma using neural network

✍ Scribed by Moonkeun Kim; Hanbyeol Jang; Yong-Hwa Lee; Kwang-Ho Kwon; Kang-Bak Park

Book ID: 118501890
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 398 KB
Volume: 521
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.03.076

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