Modeling of electron temperature and DC bias voltage in an inductively-coupled Cl2/Ar plasma using neural network

✍ Scribed by Kim, Moonkeun; Jang, Hanbyeol; Lee, Yong-Hwa; Kwon, Kwang-Ho; Park, Kang-Bak

• Book ID: 120471529
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 549 KB
• Volume: 231
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2012.07.040