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Model of particle growth in silane discharges

✍ Scribed by Gallagher, Alan

Book ID: 126106769
Publisher: The American Physical Society
Year: 2000
Tongue: English
Weight: 253 KB
Volume: 62
Category: Article
ISSN: 1063-651X
DOI: 10.1103/PhysRevE.62.2690

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