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Growth processes of particles in high frequency silane plasmas

✍ Scribed by Watanabe, Yukio

Book ID: 126197639
Publisher: AVS (American Vacuum Society)
Year: 1996
Tongue: English
Weight: 484 KB
Volume: 14
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.580141

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