Study on growth processes of particulates in helium-diluted silane rf plasmas using scanning electron microscopy

✍ Scribed by Shiratani, M.; Kawasaki, H.; Fukuzawa, T.; Tsuruoka, H.; Yoshioka, T.; Watanabe, Y.

• Book ID: 120285873
• Publisher: American Institute of Physics
• Year: 1994
• Tongue: English
• Weight: 410 KB
• Volume: 65
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.112833