Detection of particles in rf silane plasmas using photoemission method

✍ Scribed by Fukuzawa, Tsuyoshi; Obata, Kouji; Kawasaki, Hiroharu; Shiratani, Masaharu; Watanabe, Yukio

• Book ID: 120285901
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 393 KB
• Volume: 80
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.363273