Simultaneous in situ measurements of properties of particulates in rf silane plasmas using a polarization-sensitive laser-light-scattering method

✍ Scribed by Shiratani, Masaharu; Kawasaki, Hiroharu; Fukuzawa, Tsuyoshi; Yoshioka, Takashi; Ueda, Yoshio; Singh, Sanjay; Watanabe, Yukio

• Book ID: 120285899
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 359 KB
• Volume: 79
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.360916