Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering

✍ Scribed by Courteille, C.; Hollenstein, Ch.; Dorier, J.-L.; Gay, P.; Schwarzenbach, W.; Howling, A. A.; Bertran, E.; Viera, G.; Martins, R.; Macarico, A.

• Book ID: 121836894
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 472 KB
• Volume: 80
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.363118