A study of methods for moving particles in RF processing plasmas

✍ Scribed by Beck, S.E.; Collins, S.M.; O'Hanlon, J.F.

• Book ID: 117862304
• Publisher: IEEE
• Year: 1994
• Tongue: English
• Weight: 723 KB
• Volume: 22
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.279015