Suppression of particle generation in a plasma process using a sine-wave modulated rf plasma

✍ Scribed by Nobuki Kashihara; Heru Setyawan; Manabu Shimada; Yutaka Hayashi; Chan Soo Kim; Kikuo Okuyama; Sugeng Winardi

• Publisher: Springer Netherlands
• Year: 2006
• Tongue: English
• Weight: 426 KB
• Volume: 8
• Category: Article
• ISSN: 1388-0764
• DOI: 10.1007/s11051-005-9005-1