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A simple/universal rf-generator module system for use in plasma processing

✍ Scribed by Sven-Åke Eriksson; Anders Westman; Soren Berg

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 259 KB
Volume: 35
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(85)90312-4

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