A self-compensating Langmuir probe for use in rf (13.56 MHz) plasma systems

✍ Scribed by P.A Chatterton; J.A Rees; W.L Wu; K. AL-Assadi

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 591 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90022-b