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Langmuir probe studies of oxygen and chlorine discharges in a 13.56 MHz plasma reactor

โœ Scribed by K.F. Al-Assadi; N.M.D. Brown; P.A. Chatterton; J.A. Rees


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
370 KB
Volume
42
Category
Article
ISSN
0042-207X

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