Langmuir probe studies of oxygen and chlorine discharges in a 13.56 MHz plasma reactor

✍ Scribed by K.F. Al-Assadi; N.M.D. Brown; P.A. Chatterton; J.A. Rees

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 370 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90009-8