✦ LIBER ✦
Langmuir probe and optical emission studies in a radio frequency (rf) magnetron plasma used for the deposition of hydrogenated amorphous silicon
✍ Scribed by S.P. Koirala; H.H. Abu-safe; S.L. Mensah; H.A. Naseem; M.H. Gordon
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 505 KB
- Volume
- 203
- Category
- Article
- ISSN
- 0257-8972
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