Efficient negative ion production in rf plasmas using a mesh grid bias method

✍ Scribed by Okada, Junichi; Nakao, Yuichi; Tauchi, Yasushi; Fukumasa, Osamu

• Book ID: 118258842
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 457 KB
• Volume: 79
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.2805372