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Grid bias effect upon the negative ion density in a tandem plasma source

✍ Scribed by H. Takahashi; T. Kasuya; M. Wada

Book ID: 108289037
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 309 KB
Volume: 506-507
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.08.058

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