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Numerical investigation of particle formation mechanisms in silane discharges

✍ Scribed by De Bleecker, Kathleen; Bogaerts, Annemie; Gijbels, Renaat; Goedheer, Wim

Book ID: 120302435
Publisher: The American Physical Society
Year: 2004
Tongue: English
Weight: 182 KB
Volume: 69
Category: Article
ISSN: 1063-651X
DOI: 10.1103/PhysRevE.69.056409

No coin nor oath required. For personal study only.

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