✦ LIBER ✦

Observation of dust particle growth and fallout in RF-excited silane discharges

✍ Scribed by Bohme, W.; Kohler, W.E.; Romheld, M.; Veprek, S.; Seebock, R.J.

Book ID: 117862301
Publisher: IEEE
Year: 1994
Tongue: English
Weight: 700 KB
Volume: 22
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.279012

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Particle Growth Kinetics in Silane RF Di

Particle Growth Kinetics in Silane RF Discharges

✍ Shiratani, Masaharu; Fukuzawa, Tsuyoshi; Watanabe, Yukio 📂 Article 📅 1999 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 272 KB

Effects of Gas Flow on Particle Growth i

Effects of Gas Flow on Particle Growth in Silane RF Discharges

✍ Matsuoka, Yasuhiro; Shiratani, Masaharu; Fukuzawa, Tsuyoshi; Watanabe, Yukio; Ki 📂 Article 📅 1999 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 163 KB

Effects of Gas Temperature Gradient, Pul

Effects of Gas Temperature Gradient, Pulse Discharge Modulation, and Hydrogen Dilution on Particle Growth in Silane RF Discharges

✍ Shiratani, Masaharu; Maeda, Shinichi; Koga, Kazunori; Watanabe, Yukio 📂 Article 📅 2000 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 167 KB

In situ observation of nucleation and su

In situ observation of nucleation and subsequent growth of clusters in silane radio frequency discharges

✍ K. Koga; Y. Matsuoka; K. Tanaka; M. Shiratani; Y. Watanabe 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 223 KB

Plasma chemistry and growth of nanosized

Plasma chemistry and growth of nanosized particles in a C 2 H 2 RF discharge

✍ Stoykov, S; Eggs, C; Kortshagen, U 📂 Article 📅 2001 🏛 Institute of Physics 🌐 English ⚖ 267 KB

Growth of particles in cluster-size rang

Growth of particles in cluster-size range in low pressure and low power SiH[sub 4] rf discharges

✍ Fukuzawa, Tsuyoshi; Kushima, Shinji; Matsuoka, Yasuhiro; Shiratani, Masaharu; Wa 📂 Article 📅 1999 🏛 American Institute of Physics 🌐 English ⚖ 386 KB