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In situ observation of nucleation and subsequent growth of clusters in silane radio frequency discharges

✍ Scribed by K. Koga; Y. Matsuoka; K. Tanaka; M. Shiratani; Y. Watanabe

Book ID
126197585
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
223 KB
Volume
77
Category
Article
ISSN
0003-6951

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