Growth of particles in cluster-size range in low pressure and low power SiH[sub 4] rf discharges

✍ Scribed by Fukuzawa, Tsuyoshi; Kushima, Shinji; Matsuoka, Yasuhiro; Shiratani, Masaharu; Watanabe, Yukio

• Book ID: 120372015
• Publisher: American Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 386 KB
• Volume: 86
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.371256