Effects of Gas Temperature Gradient, Pulse Discharge Modulation, and Hydrogen Dilution on Particle Growth in Silane RF Discharges

✍ Scribed by Shiratani, Masaharu; Maeda, Shinichi; Koga, Kazunori; Watanabe, Yukio

• Book ID: 126811354
• Publisher: Institute of Pure and Applied Physics
• Year: 2000
• Tongue: English
• Weight: 167 KB
• Volume: 39
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.39.287