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Particle Growth Kinetics in Silane RF Discharges

✍ Scribed by Shiratani, Masaharu; Fukuzawa, Tsuyoshi; Watanabe, Yukio

Book ID: 126197645
Publisher: Institute of Pure and Applied Physics
Year: 1999
Tongue: English
Weight: 272 KB
Volume: 38
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.38.4542

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