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MOCVD and ALD of High-k Dielectric Oxides Using Alkoxide Precursors

✍ Scribed by A. C. Jones; H. C. Aspinall; P. R. Chalker; R. J. Potter; T. D. Manning; Y. F. Loo; R. O'Kane; J. M. Gaskell; L. M. Smith

Publisher: John Wiley and Sons
Year: 2006
Tongue: English
Weight: 977 KB
Volume: 12
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200500023

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