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Microstructure of β-FeSi2 buried layers synthesis by ion implantation

✍ Scribed by R. Ayache; E. Richter; A. Bouabellou

Book ID: 113822716
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 505 KB
Volume: 216
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2003.11.069

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