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Ion beam synthesis of α and β FeSi2 layers

✍ Scribed by Tim D. Hunt; Brian J. Sealy; Karen J. Reeson; Russell M. Gwilliam; Kevin P. Homewood; Richard J. Wilson; C.Douglas Meekison; G.Roger Booker


Book ID
113283652
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
526 KB
Volume
74
Category
Article
ISSN
0168-583X

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Ion beam synthesis of buried epitaxial F
✍ K. Radermacher; S. Mantl; R. Apetz; Ch. Dieker; H. Lüth 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 333 KB

We fabricated continuous buried layers of the metallic a-FeSi 2 phase by high dose implantation of Fe + into ( 11 I ) silicon wafers and subsequent rapid thermal annealing at 1150 °C for 10 s. As determined from Rutherford backscattering spectrometry, these a-FeSi 2 layers have a stoichiometry of Fe