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Optical characterization of β-FeSi2 layers formed by ion beam synthesis

✍ Scribed by R. Ayache; A. Bouabellou; E. Richter

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
223 KB
Volume
7
Category
Article
ISSN
1369-8001

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Single-phase semiconducting iron disilicide (b-FeSi 2 ) films on silicon substrate were fabricated by electron beam evaporation (EBE) technique. For preventing the oxidation of Fe film, silicon/iron/silicon sandwich structure films with different thickness of silicon and iron were deposited and then