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Photoluminescence of β-FeSi2 thin film prepared by ion beam sputter deposition method

✍ Scribed by K. Shimura; K. Yamaguchi; H. Yamamoto; M. Sasase; S. Shamoto; K. Hojou

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
165 KB
Volume
242
Category
Article
ISSN
0168-583X

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✍ M. Sasase; K. Shimura; K. Yamaguchi; H. Yamamoto; S. Shamoto; K. Hojou 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 643 KB

Beta iron disilicide (b-FeSi 2 ) is one of the candidate materials for a compound semiconductor, which is promising for optoelectronic devices. b-FeSi 2 film has been obtained by ion beam sputter deposition (IBSD) on Si(1 0 0) substrates that are pre-treated by sputter etching by Ne + . In the prese