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A pulsed synthesis of β-FeSi2 layers on silicon implanted with Fe+ ions

✍ Scribed by E.I. Terukov; V.Kh. Kudoyarova; R.I. Batalov; R.M. Bayazitov

Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 124 KB
Volume: 16
Category: Article
ISSN: 1386-9477
DOI: 10.1016/s1386-9477(02)00627-6

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