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Effect of laser irradiation on the structure of silicon dioxide films with implanted phosphorus ions

✍ Scribed by B. I. Seleznev; G. M. Emel'yanova; V. A. Tkal'; B. V. Makushkin


Publisher
Springer US
Year
1982
Tongue
English
Weight
279 KB
Volume
36
Category
Article
ISSN
0021-9037

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