✦ LIBER ✦

Effects of ion implantation on the structures of silicon dioxide films made by various methods

✍ Scribed by B. I. Seleznev; G. Ya. Moskalev; V. A. Tkal'

Publisher: Springer US
Year: 1981
Tongue: English
Weight: 408 KB
Volume: 34
Category: Article
ISSN: 0021-9037
DOI: 10.1007/bf00635215

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of laser irradiation on the struc

Effect of laser irradiation on the structure of silicon dioxide films with implanted phosphorus ions

✍ B. I. Seleznev; G. M. Emel'yanova; V. A. Tkal'; B. V. Makushkin 📂 Article 📅 1982 🏛 Springer US 🌐 English ⚖ 279 KB

Effect of ion implantation and surface s

Effect of ion implantation and surface structure of silicon on diamond film nucleation

✍ Kobayashi, Ken; Kumagai, Masao; Karasawa, Shiro; Watanabe, Takeshi; Togashi, Fum 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 492 KB

Optical effects of doped top layers in s

Optical effects of doped top layers in silicon-on-insulator structures formed by ion implantation

✍ Yu Yuehui; Lin Chenglu; Zou Shichang 📂 Article 📅 1995 🏛 Springer 🌐 English ⚖ 338 KB

Arsenic ions were implanted into silicon-on-insulator (SOl) structures at an incident energy of 100 keV to a dose of 2 x 10 lscm-z. Conductive top layers were formed in the SOl structures after annealing at 1200 ~ for 20 s. Infrared reflection spectra in the wave number range of 1500-5000 cm -1 were

The formation of SiO2 films on silicon b

The formation of SiO2 films on silicon by high dose oxygen ion implantation

✍ U. Kreissig; E. Hensel; W. Skorupa; H. Johansen 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 398 KB

Investigation of hydrogen capture in ion

Investigation of hydrogen capture in ion-bombarded silicon dioxide films by the atr method

✍ N. N. Gerasimenko; T. I. Kovalevskaya; G. M. Tseitlin 📂 Article 📅 1978 🏛 Springer US 🌐 English ⚖ 311 KB

Phosphorus and boron doping effects on s

Phosphorus and boron doping effects on solid phase recrystallization of polycrystalline silicon films amorphized by germanium ion implantation

✍ M. -Y. Kang; T. Yamamoto; T. Matsui; T. Kuwano 📂 Article 📅 1996 🏛 Springer 🌐 English ⚖ 188 KB