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Effect of ion implantation and surface structure of silicon on diamond film nucleation

✍ Scribed by Kobayashi, Ken; Kumagai, Masao; Karasawa, Shiro; Watanabe, Takeshi; Togashi, Fumitaka

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 492 KB
Volume: 128
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(93)90357-3

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